Ion Implantation for MEMS Processes
Published: Sep 2018
Micro-Electro-Mechanical-Systems (MEMS) are bridging as sensors and actuators the gap between the real analogue word and the digital world with their enormous data processing and data storage possibilities. MEMS solutions are providing significant advantages: small form factors allow the integration of sensors in miniaturized systems and their manufacturing in modern wafer processes makes them available in very high amounts at quite low costs.
Ion implantations are very important process steps in the MEMS processing. On the one hand, they are enabling technologies and devices. MEMS pressure sensors are here the best examples.