High-Voltage Sensing Device using Standard Bulk CMOS Technology

Today’s emerging technologies like photovoltaics, smart grid and electromobility are operating at high voltages which are interesting to be sensed on-chip for further processing.

In this paper we present a device implemented in standard bulk CMOS technology which is using metal gates and inter-metal dielectrics as gate oxide to build a voltage controlled conductor able to directly sense voltages levels of the mains supply up to 1kV.