Datasheet: XO035 - 350 nm Modular Sensor Technology Platform

XO035 is X-FAB’s specialized process for high-speed optoelectronics. It is especially suited for applications needing high-sensitivity high-bandwidth photodiodes arrays, such as optical data storage, optical data communication or high dynamic range sensors. Special opto-process modules allow an optimised PIN cathode implantation, optical window etching and dedicated ARC layer deposition.
Best-in-class PDK support for all major EDA vendors, extensive device characterization and modelling, comprehensive analog, digital, and memory IPs.

Key features:

• Fully modular 350 nm EPI process based on 3.3 V core module
• Alternative 5 V module
• Up to four metal layers with different thick metal options
• High-sensitive PIN photodiodes 
• Optical window etching and Anti Reflecting Coating optimized for different wavelengths 
• High gain BJTs
• Standard single, double MIM, Poly and metal fringe capacitors
• Comprehensive PDK support for Cadence, Siemens EDA, Synopsys and others