Integrated noble metal electrodes on CMOS for biomedical applications
Published: Jun 2023
Silicon-based microfluidic systems
✓ Micro-manufactured fluidic structures for chip-scale handling and analysis of small quantities of fluids (liquids & gases)
✓ With noble metal electrodes integrated on silicon ASICs, as electro-chemical transducer interface, ready to be biofunctionalized for customized applications
✓ Using silicon technology: high integration density, stable and reproducible manufacturing process