SiC Foundry at the Scale of Silicon

X-FAB continues to drive the adoption of silicon-carbide (SiC) technology forward by offering SiC foundry services at the scale of silicon. As the first pure-play foundry to offer internal SiC epitaxy and with a proven ability to run silicon and SiC on the same manufacturing line, our customers have access to high-quality and cost-effective foundry solutions. In line with the growing demand, we are committed to further expand our SiC capacity and, with the 26k wafers per month capacity at our Lubbock facility, have the right platform to meet our customers’ needs.  

With our site in Texas focused on serving the SiC market, the company is fully prepared for the expected acceleration of SiC device shipments – enabling key applications, such as electric vehicles and advanced power management systems. It allows customers to import their SiC projects into a stable and trusted, fully automotive-qualified fab environment which supports output levels that are comparable with those of IDMs. 

 

Benefits

  • 6-inch SiC processing capabilities including in-house epitaxy
  • Leveraging economies of scale of an existing 6-inch silicon fab
  • Automotive quality standards e.g. IATF-16949
  • Strong focus on IP protection
  • Second source solution for IDMs with own SiC manufacturing line

Available Tools for SiC Processing

Photolithography
  • Canon i3 Steppers [CD: 0.6um, Align: ± 0.2um]
  • TEL Mark V Coat/Develop Tracks
Deposition
  • Novellus Concept 1 PECVD [Oxides, BPSG ILD, Nitrides]
  • AMAT Endura PVD [Ti, AlCu, TiW, Ni]
  • Thermco LPCVD Furnace [PolySi]
Etch
  • Dry Etch: LAM TCP, LAM 45XX
  • Wet Etch: FSI-Mercury
Implant
  • Species supported: P, B, N2
  • Varian E500 Mid-Current Implanter
  • Axcelis GSD High-Current Implanter
  • Axcelis VHE (Very High Energy) Implanter
Thermal Processing
  • Mattson 2900 RTP
  • Thermco Horizontal Furnaces
 
 

SiC Process Capabilities

  • Epitaxy with option for dual epi-layer
  • High Temperature Implant
  • High Temperature Implant Anneal
  • SiC Wafer Thinning
  • Backside Metal Deposition (Ti/Ni/Ag)
  • Backside Laser Anneal
  • Ni Deposition and Etch
 
 

SiC data sheet download

SiC Data sheet