In MEMS development, speedy access to a large array of readily available process technologies is vital to create the most cost effective solution within a given performance envelope. X-FAB is addressing this challenge by providing a wide range of modular process options, which can be arranged to create a Customer Specific Process (CUSP). To ensure manufacturability, each development is carried out according to the X-FAB CUSP development procedure.

Every customer specific development follows the X-FAB standard process development sequence. The qualification level can be defined according to customer needs.

Customer Specific Processes






Production Release


X-FAB MEMS Process Modules

The X-FAB MEMS process modules can be combined in accordance with the X-FAB process specifications to meet customer requirements.


Available Process Modules