Itzehoe, Germany

X-FAB MEMS Foundry Itzehoe GmbH
Fraunhoferstrasse 1
25524 Itzehoe
Germany

Tel.: +49 4821 17 4228
Fax: +49 4821 17 4291

Process / Technical Capabilities:

  • Physical sensors: acceleration, angular rate, mass flow
  • MOEMS: micro mirror scanner, microoptics 
  • RF-MEMS: variable capacity RF switches
  • Novel technology development: piezoelectric MEMS actuators
  • Wafer level packaging: AuSi, AuSn, glass frit, anodic, Getter integration, TSV

Overall capacity:

  • > 13,000 eight inch equivalent wafer starts per month

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