Virtual Wafer Processing
SEMulator by Coventor Inc.
SEMulator creates a 3D MEMS structure using the 2D design data and a calibrated process script. The program can considerably simplify the creation of a MEMS layout for a designer who is using an X-FAB foundry process. It creates realistic images of the final MEMS device and allows a process specific design control already before the first mask creation and the first fab run.