
http://www.xfab.com/jp/main/technology/mems/bulk-micromachining.html?no_cache=1&print=1
Bulk Micromachining
MEMS
X-FAB's product offering also includes high performance bulk micromachining platform technologies. These are mostly used for pressure and IR radiation sensor applications. The technologies can be modified in accordance with the X-FAB design rules to meet customer requirements.

