X-FAB offers four different MEMS process technology options:

  • Custom technology development to accommodate a wide variety of different MEMS process requirements using available MEMS process modules. The technology development follows the X-FAB process development sequence. The qualification level can be defined according to customer needs.
  • X-FAB generic bulk micromachining technology platform for the fabrication of relative pressure and IR radiation sensors.
  • X-FAB generic surface micromachining technology platform for the fabrication of absolute pressure and inertial sensors.
  • X-FAB generic CMOS-MEMS integration platform for all above-mentioned MEMS technologies.