As the first pure-play MEMS foundry in the world, X-FAB relies on more than 10 years of experience. Its main asset here is the in-house coexistence of both MEMS and CMOS mixed-signal processes: Since MEMS devices are manufactured using techniques similar to those employed for integrated circuits, X-FAB can exploit the synergies offered by the alliance of both technologies. This enables X-FAB to offer the same high quality organization, procurement, and experience in high volume manufacturing in the field of MEMS technology as in its microelectronics processes.
Featuring a dedicated 400 m2 MEMS back end clean room and a 1,200 m2 CMOS front end clean room, the X-FAB MEMS foundry boasts a capacity of 2,500 MEMS wafer starts per month. Main focus of activities is on the high volume manufacturing of bulk and surface micromachined technologies, with and without CMOS integration, for a wide range of automotive, industrial, and medical applications. Drawing from its long-time experience, X-FAB has developed its own technology platforms for mainstream MEMS applications such as pressure sensors, inertial sensors and infrared sensors. These can easily be adapted to meet customer requirements.
