X-FAB MEMS Foundry Itzehoe GmbH
Fraunhoferstrasse 1
25524 Itzehoe
Germany

Tel.: +49 4821 17 4221
Fax: +49 4821 17 4250

Process / Technical Capabilities:

• Physical sensors: acceleration, angular rate, mass flow
• MOEMS: micro mirror scanner, microoptics 
• RF-MEMS: variable capacity RF switches
• Novel technology development: piezoelectric MEMS actuators
• Wafer level packaging: AuSi, AuSn, glass frit, anodic, Getter integration, TSV

Overall capacity:

• > 13,000 eight inch equivalent wafer starts per month
  
  

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