22 entries, filtered by: SOI
Published: May 2012

XDM10 is X-Fab´s dielectric trench insulated smart power technology. Main target applications are analog switch ICs, driver ICs for capacitive, inductive and resistive loads and EL / piezo driver ICs for applications using 110V net supply. The typical breakdown voltage of the HV-DMOS devices is >350 V or >275V. The modular process combines DMOS, bipolar and CMOS processing steps that are compatible with dielectric insulation to provide a wide variety of MOS and bipolar devices with different voltage levels within a dielectric bi-directional high voltage trench insulation on the same die.


More
Published: June 2011

In this paper, micromachined acceleration sensors as ready-to-use Intellectual-Property-Blocks (IP-Blocks) are introduced. These standard elements are available for a special surface micromachining foundry technology. They are ready to use, characterized and qualified design elements, which can be customized by changing the peripheral elements such as bond pads, and allow the fast prototyping and production start of high-performance inertial sensors.


More
Published: May 2011

This paper demonstrates and explains the effects of hot carrier injection and interface charge trapping correlated with impact ionization under normal on-state conditions in a highly dense low-resistance Super-Junction LDMOSFET. The study is done through extensive experimental measurements and numerical simulations using advanced trap models.


More
Published: May 2011

In this paper we present a modular trench isolated high voltage SOI process with the possibility to integrate various types of high voltage transistors. The integration of these additional 650 V devices takes place in a modular approach which allows a high process flexibility to support different applications with a minimum number of additional or changed process steps.


More
Published: April 2011

The XT06 Series completes X-FAB's 0.6 Micron Modular Mixed Signal Technology.
XT06 uses dielectric isolation on SOI wafers. This allows unrestricted 60 V high and low side operation of all devices. The process offers reduced parasitics which results in smaller crosstalk, reduced noise and better EMC characteristics. Thus XT06 allows innovative circuit design with reduced circuit complexity. CMOS as well as Bipolar Transistors are available with breakdown voltages up to 110V.
The 5 V CMOS core is compatible in design rules and transistor performance with state of the art 0.6μm CMOS processes.
For analog applications several capacitor and resistor devices are realized, using the double-poly architecture.


More
Published: July 2010

A novel 0.18μm 200V integrated technology based on Partial SOI and lateral Super Junctions devices is presented. The dielectric isolation inherent in SOI allows simple and areaefficient integration of electrically floating CMOS and HV devices while removing all substrate carrier injection-related parasitic effects. The Super Junctions give a competitively low on-resistance of HVMOS and provide a wide-range breakdown voltage-scaling capability.


More
Published: November 2008

Several methods have been investigated for gettering impurities during CMOS processing, in order to achieve high-quality oxides on thick SOI. The use of buried implants, buried polysilicon, surface implants, and isolation trenches was found to significantly improve the oxide quality in each case


More
Published: May 2008

The long term isolation properties of deep trenches in thick SOI have been investigated by current-voltage characteristics. A strong change of the measured trench leakage current was observed depending on the applied voltage. Further on a marked decrease of the leakage current was observed depending on the duration and polarity of the applied stress.


More
Published: September 2005

This paper presents the results of a three and a half year R&D project for low cost micromachined gyroscopes. As starting point of this work the application requirements of enhanced automotive applications such as Advanced Driving Assistant Systems (ADAS) are given. Based on these demands the sensor development is carried out.


More
Published: May 2005

This work describes the electrical performance of a high voltage deep trench isolation on SOI wafers. Several process and design related effects on the electrical isolation capability are investigated. Several process parameters during the trench process are examined with regard to isolation capability as well as defect generation. Trench edge geometry and layout have also a very strong impact on the isolation capability.


More