http://www.xfab.com/de/main/about-x-fab/qualitaet/failure-analysis/x-fab-fa-tool-set.html?no_cache=1&print=1

 
  • SEM / EDX
  • Cross section
  • Grinding
  • Package opening
  • Layer removal
  • Spreading resistance
  • Optical Microscope
  • FIB
  • OBRICH
  • SIMS, AES
  • EMMI
  • E-Beam
  • LCA - probe
  • TEM / EDX